For citations:
Zharin A.L., Gasenkova I.V., Tyavlovsky A.K., Mukhurov N.I., Spitski S.I. Detection of Hidden Defects Induced by Thermomechanical Processing of Aluminum Substrates for Sensor Devices Using a Scanning Kelvin Probe. Devices and Methods of Measurements. 2025;16(1):47-54. https://doi.org/10.21122/2220-9506-2025-16-1-47-54