pimiПриборы и методы измеренийDevices and Methods of Measurements2220-95062414-0473BNTU10.21122/2220-9506-2025-16-1-47-54pimi-923Research ArticleМетоды измерений, контроля, диагностикиMethods of measurements, monitoring, diagnosticsВыявление скрытых дефектов алюминиевых подложек для сенсорных устройств после термомеханической обработки с помощью сканирующего зонда КельвинаDetection of Hidden Defects Induced by Thermomechanical Processing of Aluminum Substrates for Sensor Devices Using a Scanning Kelvin ProbeЖаринА. Л.ZharinA. L

пр-т Независимости; 65; г. Минск 220013

Nezavisimosty Ave., 65, Minsk 220013

ГасенковаИ. В.GasenkovaI. V.

пр-т Независимости; 68-1; г. Минск 220012

Nezavisimosty Ave., 68-1, Minsk 220012

ТявловскийА. К.TyavlovskyA. K.

Адрес для переписки: Тявловский А. К. –Белорусский национальный технический университет,пр-т Независимости, 65,г. Минск 220013, Беларусь e-mail: tyavlovsky@bntu.by

Address for correspondence: Tyavlovsky A.K. -Belarusian National Technical University,Nezavisimosty Ave., 65,Minsk 220013, Belarus e-mail: andrey_psf@tut.by

tyavlovsky@bntu.byМухуровН. И.MukhurovN. I.

пр-т Независимости; 68-1; г. Минск 220012

Nezavisimosty Ave., 68-1, Minsk 220012

СпицкийС. И.SpitskiS. I.

пр-т Независимости; 68-1; г. Минск 220012

Nezavisimosty Ave., 68-1, Minsk 220012

Белорусский национальный технический университетБеларусьBelarusian National Technical UniversityBelarusГНПО «Оптика, оптоэлектроника и лазерная техника»БеларусьSSPA "Optics, Optoelectronics, and Laser Technology"Belarus2025260320251614754Copyright © Жарин А.Л., Гасенкова И.В., Тявловский А.К., Мухуров Н.И., Спицкий С.И., 20252025Жарин А.Л., Гасенкова И.В., Тявловский А.К., Мухуров Н.И., Спицкий С.И.Zharin A.L., Gasenkova I.V., Tyavlovsky A.K., Mukhurov N.I., Spitski S.I.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://pimi.bntu.by/jour/article/view/923

Объектом исследования являлись алюминиевые подложки для создания сенсорных устройств на основе анодного оксида алюминия; прошедшие механическую обработку в виде утонения; рихтовки и химической очистки поверхности. Предмет исследования – выявление остаточных механических напряжений; внутренних и поверхностных дефектов для оценки качества данной обработки методом сканирующего зонда Кельвина. Показано; что данный метод позволяет эффективно выявлять остаточные пластические деформации алюминиевых подложек; являющиеся следствием их термомеханической обработки; с разрешением; достаточным для выявления механических напряжений; связанных с отдельными шероховатостями.

The object of the study was aluminum substrates for creating sensor devices based on anodic aluminum oxide, which underwent mechanical processing in the form of grinding and straightening. The subject of the study was the detection of residual mechanical stresses and other surface defects to assess the quality of this processing using the scanning Kelvin probe technique. The technique applied allows for the effective detection of residual plastic deformations of aluminum substrates resulting from their mechanical processing with a resolution sufficient to detect mechanical stresses associated with individual roughnesses.

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The authors declare that there are no conflicts of interest present.