For citations:
Chizhik S.A., Basalaev S.P., Pilipenko V.A., Khudoley A.L., Kuznetsova T.A., Chikunov V.V., Suslov A.A. EQUIPMENT FOR NONDESTRUCTIVE TESTING OF SILICON WAFERS SUBMICRON TOPOLOGY DURING THE FABRICATION OF INTEGRATED CIRCUITS. Devices and Methods of Measurements. 2013;(1):14-18. (In Russ.)
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