FOUR SENSOR GAS MICROSYSTEM BASED ON POROUS ANODIC ALUMINA SUBSTRATE: DESIGN, FABRICATION TECHNIQUE, SIMULATION
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Abstract
Design and fabrication technique of four sensor gas microsystem based on nanoporous anodic alumina have been developed. Simulation of basic elements′ temperature and thermo-mechanical deformation created in the microsystem construction has been carried out by finite element method. r-spacing:-.05pt'>боты микросистемы.
About the Authors
O. G. Reutskaya
Минский НИИ радиоматериалов, г. Минск
Belarus
Belarus
Ya. A. Belahurau
Белорусский национальный технический университет
Belarus
Belarus
I. A. Taratyn
Минский НИИ радиоматериалов, г. Минск
Belarus
Belarus
V. V. Khatko
Белорусский национальный технический университет
Russian Federation
Russian Federation
References
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3. Belogurov, E.A. Konstruirovanie gazovykh mikrosistem na osnove nanoporistogo anodnogo oksida alyuminiya / E.A. Belogurov [i dr.] // Pribory i metody izmerenii. - 2011. № 2. - S. 59-65.
4. Barkalin, V.V. Konechno-elementnoe modelirovanie termomekhanicheskikh svoistv nanoporistykh materialov / V.V. Barkalin [i dr.] // Nanoi mikrosistemnaya tekhnika. - 2012. - № 1. - S. 18-24.
Review
For citations:
Reutskaya O.G., Belahurau Ya.A., Taratyn I.A., Khatko V.V. FOUR SENSOR GAS MICROSYSTEM BASED ON POROUS ANODIC ALUMINA SUBSTRATE: DESIGN, FABRICATION TECHNIQUE, SIMULATION. Devices and Methods of Measurements. 2013;(2):47-51. (In Russ.)
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ISSN 2220-9506 (Print)
ISSN 2414-0473 (Online)
ISSN 2414-0473 (Online)
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