For citations:

Klimovich I.M., Kuleshov V.N., Zaikou V.A., Burmakou A.P., Komarov F.F., Ludchik O.R. GAS FLOW CONTROL SYSTEM IN REACTIVE MAGNETRON SPUTTERING TECHNOLOGY. Devices and Methods of Measurements. 2015;6(2):139-147. (In Russ.) https://doi.org/10.21122/2220-9506-2015-6-2-67-75