For citations:

Kovalchuk N.S., Pilipenko Y.A., Solovjov J.А. Effect of Pulsed Photon Processing in a Nitrogen Ambient on the Reliability of Gate Silicon Oxide Obtained by Pyrogenic Oxidation. Devices and Methods of Measurements. 2025;16(3):275-280. (In Russ.) https://doi.org/10.21122/2220-9506-2025-16-3-275-280