For citations:
Lapitskaya V.A., Chizhik S.A., Lutsenko E.V., Solovjov J.A., Nasevich A.A., Liutsko K.S., Petlitskaya T.V., Makarevich V.B., Guangbin Yu. Control of Integrated Circuits Crystals' Surface Microrelief and Defects of Heteroand Submicrostructures by the Atomic Force Microscopy Method. Devices and Methods of Measurements. 2024;15(4):316-322. https://doi.org/10.21122/2220-9506-2024-15-4-316-322