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Devices and Methods of Measurements

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For citations:

Pilipenko U.A., Sergeichik A.A., Shestovski D.V., Solodukha V.A. Structure of Silicon Wafers Planar Surface before and after Rapid Thermal Treatment. Devices and Methods of Measurements. 2024;15(2):142-150. (In Russ.) https://doi.org/10.21122/2220-9506-2024-15-2-142-150

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ISSN 2220-9506 (Print)
ISSN 2414-0473 (Online)

Belarusian National Technical University
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Phone: +375 17 293 96 67
E-mail: pimi@bntu.by

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