Poklonski N.A., Anikeev I.I., Vyrko S.A. High-Frequency Capacitor with Working Substance "Insulator-Undoped Silicon-Insulator". Devices and Methods of Measurements. 2022;13(4):247-255. https://doi.org/10.21122/2220-9506-2022-13-4-247-255
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