For citations:

Adamchuck D.V., Ksenevich V.K. Control of Electrical and Optical Parameters of Humidity Sensors Active Elements Based on Tin Oxides Films with Variable Composition. Devices and Methods of Measurements. 2019;10(2):138-150. (In Russ.) https://doi.org/10.21122/2220-9506-2019-10-2-138-150