pimiПриборы и методы измеренийDevices and Methods of Measurements2220-95062414-0473BNTU10.21122/2220-9506-2019-10-2-138-150pimi-437Research ArticleСредства измеренийMeasuring instrumentsУправление электрическими и оптическими параметрами активных элементов датчиков влажности на основе пленок оксидов олова переменного составаControl of Electrical and Optical Parameters of Humidity Sensors Active Elements Based on Tin Oxides Films with Variable CompositionАдамчукД. B.AdamchuckD. V.КсеневичВ. К.KsenevichV. K.

Адрес для переписки: В.К. Ксеневич – Белорусский государственный университет, пр. Независимости, 4, г. Минск 220030, Беларусь.     e-mail: ksenevich@bsu.by

Address for correspondence: V.K. Ksenevich – Belarusian State University, Nezavisimosty Ave., 4, Minsk 220030, Belarus.     e-mail: ksenevich@bsu.by

ksenevich@bsu.byБелорусский государственный университетБеларусьBelarusian State UniversityBelarus201924062019102138150Copyright © Адамчук Д.B., Ксеневич В.К., 20192019Адамчук Д.B., Ксеневич В.К.Adamchuck D.V., Ksenevich V.K.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://pimi.bntu.by/jour/article/view/437

Цель работы – разработка методики синтеза пленок оксидов олова различного стехиометрического состава, характеризующихся высокими электропроводностью и коэффициентом пропускания света в УФи видимом диапазоне электромагнитного спектра, для дальнейшего их применения в качестве датчиков влажности и газов, а также электродов для электрои фотокаталитических преобразователей.

Нестехиометрические пленки SnO/SnO2 /SnO2−δ были синтезированы методом реактивного магнетронного распыления олова на стеклянные подложки в плазме аргона с добавлением кислорода и последующим термическим окислением формируемых слоев на воздухе. Для изменения структурных, оптических и электрических свойств пленок и подбора оптимальных параметров синтеза варьировались содержание кислорода в процессе напыления и температура отжига на воздухе в диапазонах 0−2 об. % и 200−450 °C соответственно. Характеризация пленок проводилась с использованием 4-х зондового метода измерений электрического сопротивления, рентгеновской дифракции и оптической спектроскопии пропускания света.

В результате комплексного анализа структурных, оптических и электрических свойств пленок установлено, что для получения наиболее прозрачных и проводящих покрытий, перспективных для использования в качестве датчиков влажности и газов, а также в фотоэлектрических устройствах, оптимальными параметрами синтеза являются: содержание кислорода в аргоновой плазме в процессе напыления ≈ 0,8–1,2 об. %, температура отжига на воздухе ≈ 350–375 °C. При этом формируется поликристаллическая пленка, в которой преобладает фаза диоксида олова, содержащая структурные дефекты (кислородные вакансии), обеспечивающие сочетание высоких электропроводности и коэффициента пропускания в видимой и УФ-области электромагнитного спектра.

The aim of this work is development of technique for synthesis of tin oxides films with various stoichiometric composition, characterized by high electrical conductivity and light transmittance in the UV and visible range of the electromagnetic spectrum, for their further application as humidity and gas sensors, as well as electrodes for electro-and photocatalytic converters.

Nonstoichiometric SnO/SnO2 /SnO2−δ films were synthesized by reactive magnetron sputtering of tin onto glass substrates in argon plasma with oxygen addition and with subsequent thermal oxidation of the formed layers in air. To change the structural, optical, and electrical properties of the films and to find out the optimal synthesis parameters, the oxygen content during the deposition process and the annealing temperature in air were varied in the range of 0–2 vol. % and of 200–450 °C, respectively. The characterization of the films was carried out using a 4-probe method for measuring the electrical resistance, X-ray diffraction, and optical spectroscopy of light transmission.

As a result of a comprehensive analysis of the structural, optical and electrical properties of the films, it was found that the optimal synthesis parameters to obtain the most transparent and conductive coatings promising for use as humidity, gas sensors and in photovoltaic devices are the following: oxygen content in argon plasma during sputtering process is ≈ 0,8–1,2 vol. %, the annealing temperature in air is ≈ 350–375 °C. In this case a polycrystalline film with high electrical conductivity and high transmittance in the visible and UV regions of the electromagnetic spectrum with prevailing of tin dioxide phase with structural defects (oxygen vacancies) is formed.

реактивное магнетронное распылениеоксид оловастехиометрический составспектры пропусканияэлектропроводностьreactive magnetron sputteringtin oxidestoichiometric compositiontransmission spectraelectrical conductivityРабота выполнена в рамках задания 3.3.1 ГПНИ «Конвергенция-2020» (подпрограмма «Объединение»). Авторы выражают благодарность Шиманскому В.И. за проведение рентгеноструктурных исследований.This work was carried out within frame of Belarus.ian National Research Program “Convergence-2020” (subprogram “Integration”, grant No. 2.31.1). The authors are grateful to Shimanskij V.I. for implementation of X-ray diffraction studies.ReferencesKhan, A.F. Effect of annealing on electrical resistivity of rf-magnetron sputtered nanostructured SnO2 thin films / A.F. Khan [et al.] // Applied Surface Science. – 2009. – Vol. 255, № 20. – P. 8562–8565. DOI: 10.1016/j.apsusc.2009.06.020Khan A.F., Mehmood M., Rana A.M., Bhatti M.T. Effect of annealing on electrical resistivity of Rf-magnetron sputtered nanostructured SnO2 thin films. Applied Surface Science, 2009, vol. 255, no. 20, pp. 8562–8565. DOI: 10.1016/j.apsusc.2009.06.020Liu, Bin. Salt-Assisted Deposition of SnO2 on α-MoO3 nanorods and fabrication of polycrystalline SnO2 nanotubes / Bin Liu, Zeng Hua Chun // J. Phys. Chem. B. – 2004. – Vol.108, no. 19. – P. 5867–5874. DOI: 10.1021/jp037822dBin Liu, Hua Chun Zeng. Salt-assisted deposition of SnO2 on α-MoO3 nanorods and fabrication of polycrystalline SnO2 nanotubes. J. Phys. Chem. B, 2004, vol. 108, no. 19, pp. 5867–5874. DOI: 10.1021/jp037822dKorotcenkov, G. Catalytically active filters deposited by SILD method for inhibiting sensitivity to ozone of SnO2 based conductometric gas sensors / G. Korotcenkov [et al.] // Ferroelectrics. – 2014. – Vol. 459. – P. 46–51. DOI: 10.1080/00150193.2013.837765Korotcenkov G., Cho B., Brinzari V., Gulina L., Tolstoy V. Catalytically active filters deposited by SILD method for inhibiting sensitivity to ozone of SnO2 based conductometric gas sensors. Ferroelectrics, 2014, vol. 459, pp. 46–51. DOI: 10.1080/00150193.2013.837765Ma, N. Effect of water vapor on Pd-loaded SnO2 nanoparticles gas sensor / N. Ma [et al.] // ACS Appl. Mater. Interfaces. – 2015. – Vol. 7, no. 10. – P. 5863– 5869. DOI: 10.1021/am509082wMa N., Suematsu K., Yuasa M., Kida T., Shimanoe K. Effect of water vapor on Pd-Loaded SnO2 nanoparticles gas sensor. ACS Appl. Mater. Interfaces, 2015, vol. 7, no. 10, pp. 5863–5869. DOI: 10.1021/am509082wHuang, H. Needle-like Zn-doped SnO2 nanorods with enhanced photocatalytic and gas sensing properties / H. Huang [et al.] // Nanotechnology. – 2012. –Vol. 23, no. 10. – P. 105502. DOI: 10.1088/0957-4484/23/10/105502Huang H., Tian S., Xu J., Xie Z., Zeng D., Chen D., Shen G. Needle-like Zn-doped SnO2 nanorods with enhanced photocatalytic and gas sensing properties. Nanotechnology, 2012, vol. 23, no. 10, pp. 105502. DOI: 10.1088/0957-4484/23/10/105502Alaf, M. Tin/Tinoxide (Sn/SnO2 ) Nanocomposites thin films as negative-electrode materials for li-ion batteries / M. Alaf, D. Gultekin, H. Akbulut // Acta Physica Polonica A. – 2013. – Vol. 123, no. 2. – P. 323–325. DOI: 10.12693/APhysPolA.123.323Alaf M., Gultekin D., Akbulut H. Tin/Tinoxide (Sn/SnO2 ) nanocomposites thin films as negative-electrode materials for li-ion batteries. Acta Physica Polonica A, 2013, vol. 123, no. 2, pp. 323–325. DOI: 10.12693/APhysPolA.123.323Lou, X.W. Designed Synthesis of coaxial SnO2 @ carbon hollow nanospheres for highly reversible lithium storage / X.W. Lou, C.M. Li, L.A. Archer // Advanced Materials. – 2009. DOI: 10.1002/adma.200803439Lou X.W., Li C.M., Archer L.A. Designed synthesis of coaxial SnO2 @carbon hollow nanospheres for highly reversible lithium storage. Advanced Materials, 2009. DOI: 10.1002/adma.200803439Journals, I. Comparative studies of Cerium and Zirconium doped Barium Titanate / I. Journals // International Association of Scientific Innovation and Research (IASIR). – 2014. – P. 15–19.Journals I. Comparative studies of cerium and zirconium doped barium titanate. International Association of Scientific Innovation and Research (IASIR), 2014, pp. 15–19.Lu, Y.C. Electrochemical properties of tin oxide anodes for sodium-ion batteries / Y.C. Lu [et al.] // Journal of Power Sources. – 2015. – Vol. 284. – P. 287–295. DOI: 10.1016/j.jpowsour.2015.03.042Lu Y.C., Ma C., Alvarado J., Kidera T., Dimov N., Meng Y.S., Okada S. Electrochemical properties of tin oxide anodes for sodium-ion batteries. Journal of Power Sources, 2015, vol. 284, pp. 287–295. DOI: 10.1016/j.jpowsour.2015.03.042Lu, Y.C. Improved electrochemical performance of tin-sulfide anodes for sodium-ion batteries / Y.C. Lu [et al.] // J. Mater. Chem. A. – 2015. – Vol. 3, no. 33. – P. 16971–16977. DOI: 10.1039/C5TA03893FLu Y.C., Ma C., Alvarado J., Dimov N., Meng Y.S., Okada S. Improved electrochemical performance of tin-sulfide anodes for sodium-ion batteries. J. Mater. Chem. A, 2015, vol. 3, no. 33, pp. 16971–16977. DOI: 10.1039/C5TA03893FSaravanakumar, B. Enhanced pseudocapacitive performance of SnO2 , Zn-SnO2 , and Ag-SnO2 nanoparticles / B. Saravanakumar // Ionics. – 2018. – Vol. 24, no. 12. – P. 4081–4092. DOI: 10.1007/s11581-018-2727-8Saravanakumar B., Ramachandran S.P., Ravi G., Ganesh V., Ravichandran S., Muthu Mareeswaran P., Yuvakkumar R. Enhanced pseudocapacitive performance of SnO2 , Zn-SnO2 , and Ag-SnO2 nanoparticles. Ionics, 2018, vol. 24, no. 12, pp. 4081–4092. DOI: 10.1007/s11581-018-2727-8Ohodnicki, P.R. Characterization of optical, chemical, and structural changes upon reduction of sol– gel deposited SnO2 thin films for optical gas sensing at high temperatures / P.R. Ohodnicki [et al.] // Thin Solid Films. – 2012. – Vol. 520, no. 19. – P. 6243–6249. DOI: 10.1016/j.tsf.2012.05.023Ohodnicki P.R., Natesakhawat S., Baltrus J.P., Howard B., Brown T.D. Characterization of optical, chemical, and structural changes upon reduction of sol– gel deposited SnO2 thin films for optical gas sensing at high temperatures. Thin Solid Films, 2012, vol. 520, no. 19, pp. 6243–6249. DOI: 10.1016/j.tsf.2012.05.023Presley, R.E. Tin oxide transparent thin-film transistors / R.E. Presley [et al.] // J. Phys. D: Appl. Phys. – 2004. – Vol. 37, no. 20. – P. 2810–2813.Presley R.E., Munsee C.L., Park C.-H., Hong D., Wager J.F., Keszler D.A. Tin oxide transparent thin-film transistors. J. Phys. D: Appl. Phys., 2004, vol. 37, no. (20), pp. 2810–2813. DOI: 10.1088/0022-3727/37/20/006Jeong, J.-A. Characteristics of inkjet-printed nano indium–tin oxide particles for transparent conducting electrodes / J.-A. Jeong, H.-K. Kim // Current Applied Physics. – 2010. – Vol. 10, no. 4, Supplement, p. e105– e108. DOI: 10.1016/j.cap.2010.06.009Jeong J.-A., Kim H.-K. Characteristics of inkjetprinted nano indium tin oxide particles for transparent conducting electrodes. Current Applied Physics, 2010, vol. 10, no. 4, Supplement, pp. e105–e108. DOI: 10.1016/j.cap.2010.06.009Minami, T. Transparent conducting oxide semiconductors for transparent electrodes / T. Minami // Semicond. Sci. Technol. – 2005. – Vol. 20, no. 4. – P. S35–S44. DOI: 10.1088/0268-1242/20/4/004Minami T. Transparent conducting oxide semiconductors for transparent electrodes. Semicond. Sci. Technol., 2005, vol. 20, no. 4, pp. S35–S44. DOI: 10.1088/0268-1242/20/4/004Ksenevich, V. Fabrication and characterization of transparent tin dioxide films with variable stoichiometric composition / V. Ksenevich [et al.] // Acta Physica Polonica A. – 2015. – Vol. 128, no. 5. – P. 861–863. DOI: 10.12693/APhysPolA.128.861Ksenevich V., Adamchuk D., Odzhaev V., Zukowski P. Fabrication and characterization of transparent tin dioxide films with variable stoichiometric composition. Acta Physica Polonica A, 2015, vol. 128, no. 5, pp. 861–863. DOI: 10.12693/APhysPolA.128.861Wang, Z. Transparent SnO–SnO2 p–n junction diodes for electronic and sensing applications / Z. Wang [et al.] // Advanced Materials Interfaces. – 2015. – Vol. 2, no. 18. – P. 1500374. DOI: 10.1002/admi.201500374Wang Z., Nayak P.K., Albar A., Wei N., Schwingenschlögl U., Alshareef H.N. Transparent SnO–SnO2 p–n junction diodes for electronic and sensing applications. Advanced Materials Interfaces, 2015, vol. 2, no. 18, pp. 1500374. DOI: 10.1002/admi.201500374Zakaryan, H. Adsorption of the H and H2 O on SnO2 surfaces in an O2 environment: density functional theory study. – 2016. – Vol. 9, no. 4. – P. 283–293.Zakaryan H. Adsorption of the H and H2 O on SnO2 surfaces in an O2 environment: density functional theory study. Armenian Journal of Physics, 2016, vol. 9, no. 4, pp. 283–293.Rusling, J.F. Environmental electrochemistry: fundamentals and applications in pollution abatement / J.F. Rusling // J. Am. Chem. Soc. – 1998. – Vol. 120, no. 45. – P. 11837–11837. DOI: 10.1021/ja975699wRusling J.F. Environmental Electrochemistry: Fundamentals and applications in pollution abatement. J. Am. Chem. Soc., 1998, vol. 120, no. 45, pp. 11837–11837. DOI: 10.1021/ja975699wZhang, C. Communication: Computing the Helmholtz capacitance of charged insulator-electrolyte interfaces from the supercell polarization / С. Zhang // J Chem Phys. – 2018. – Vol. 149, no. 3. – P. 031103. DOI: 10.1063/1.5038639Zhang C. Communication: Computing the helmholtz capacitance of charged insulator-electrolyte interfaces from the supercell polarization. J. Chem. Phys., 2018, vol. 149, no. 3, pp. 031103. DOI: 10.1063/1.5038639Sinha, A.K. Tin oxide with a p–n heterojunction ensures both UV and visible light photocatalytic activity / A.K. Sinha [et al.] // RSC Adv. – 2013. – Vol. 4, no. 1. – P. 208–211. DOI: 10.1039/C3RA42740DSinha A.K., Manna P.K., Pradhan M., Mondal C., Yusuf S.M., Pal T. Tin oxide with a p–n heterojunction ensures both UV and visible light photocatalytic activity. RSC Adv., 2013, vol. 4, no. 1, pp. 208–211. DOI: 10.1039/C3RA42740DSrinivasan, V. Phase-change annealing effects on electrical and optical properties of tin oxide thin films / V. Srinivasan // Journal of Optoelectronics and Advanced Materials. – 2010. – Vol. 12, no. 7. – P. 1485–1489.Srinivasan V., Patra M., Choudhary V., Mathew M., Pandya A. Phase-change annealing effects on electrical and optical properties of tin oxide thin films. Journal of Optoelectronics and Advanced Materials, 2010, vol. 12, no. 7, pp. 485–1489.Batzill, M. The surface and materials science of tin oxide / M. Batzill, U. Diebold // Progress in Surface Science. – 2005. – Vol. 79, no. 2. – P. 47–154. DOI: 10.1016/j.progsurf.2005.09.002Batzill M., Diebold U. The Surface and materials science of tin oxide. Progress in Surface Science, 2005, vol. 79, no. 2, pp. 47–154. DOI: 10.1016/j.progsurf.2005.09.002Иванов, В.В. Получение порошков SnO2 разложением термически нестабильных соединений / В.В. Иванов [и др.] // Журнал Сибирского федерального университета. – 2010. – Т. 3, № 2. – С. 189–213.Ivanov V.V., Sidorak I.A., Shubin A.A., Denisova L.T. [Preparation of SnO2 powders by decomposition of thermally unstable compounds]. Zhurnal Sibirskogo federal'nogo universiteta [Journal of the Siberian Federal University], 2010, vol.3, no. 2, pp. 189–213.Шатохин, А.Н. Газочувствительность к водороду тонких пленок диоксида олова, поверхностно легированых лазерной плазмой платины различной структуры и зарядового состава / А.Н. Шахотин [и др.] // Вестник Московского университета. Серия 2. Химия. – 2009. – Т. 50, № 6. – С. 468–471.Shatokhin A.N., Putilin F.N., Rumyantseva M.N., Gaskov A.M. [Gas sensitivity to hydrogen of thin films of tin dioxide superficially doped with platinum laser plasma of various structures and charge composition.]. Vestnik Moskovskogo universiteta. Seriya 2. Khimiya. [Bulletin of Moscow University. Series 2. Chemistry], 2009, vol. 50, no. 6, pp. 468–471.Sarmah, S. Optical properties of SnO2 nanoparticles / S. Sarmah, A. Kumar // Indian J Phys. – 2010. – Vol. 84, № 9. – P. 1211–1221. DOI: 10.1007/s12648-010-0109-9Sarmah S., Kumar A. Optical properties of SnO2 nanoparticles. Indian J. Phys., 2010, vol. 84, no. 9, pp. 1211–1221. DOI: 10.1007/s12648-010-0109-9Адамчук, Д.В. Импедансная спектроскопия поликристаллических пленок диоксида олова / Д.В. Адамчук [и др.] // Приборы и методы измерений. – 2016. – Т. 7, № 3. – С. 312–321. DOI: 10.21122/2220-9506-2016-7-3-312-321Adamchuck D.V. Ksenevich V.K. Gorbachuk N.I., Shimanskij V.I. Impedance spectroscopy of polycrystalline tin dioxide films. Devices and Methods of Measurements, 2016, vol. 7, no. 3, pp. 312–321. DOI: 10.21122/2220-9506-2016-7-3-84-89.Shamala, K.S. Studies on tin oxide films prepared by electron beam evaporation and spray pyrolysis methods / K.S. Shamala, L.C.S. Murthy, Rao K. Narasimha // Bull Mater Sci. – 2004. – Vol. 27, no. 3. – P. 295–301. DOI: 10.1007/BF02708520Shamala K.S., Murthy S., Narasimha Rao K. Studies on tin oxide films prepared by electron beam evaporation and spray pyrolysis methods. Bull Mater Sci., 2004, vol. 27, no. 3, pp. 295–301. DOI: 10.1007/BF02708520Srinivasan, V. Phase-change annealing effects on electrical and optical properties of tin oxide thin films / V. Srinivasan [et al.] // Institutional Repository IIT Bombay. – 2010. – Vol. 12, no. 7. – P. 1485–1489.Srinivasan V., Patra M., Choudhary V., Mathew M., Pandya A. Phase-change annealing effects on electrical and optical properties of tin oxide thin films Institutional Repository IIT Bombay, 2010, vol. 12, no. 7, pp. 1485–1489.Sefardjella, H. Characterization of SnO2 obtained from the thermal oxidation of vacuum evaporated Sn thin films / H. Sefardjella [et al.] // Journal of Physics and Chemistry of Solids. – 2013. – Vol. 74, no. 12. – P. 1686– 1689. DOI: 10.1016/j.jpcs.2013.06.008Sefardjella H., Boudjema B., Kabir A., Schmerber G. Characterization of SnO2 obtained from the thermal oxidation of vacuum evaporated Sn thin films. Journal of Physics and Chemistry of Solids, 2013, vol. 74, no. 12, pp. 1686–1689. DOI: 10.1016/j.jpcs.2013.06.008Abdullah, N. Preparation of tin oxide (SnO2 ) thin films using thermal oxidation / N. Abdullah, N.M. Ismail, D.M. Nuruzzaman // IOP Conf. Ser.: Mater. Sci. Eng. – 2018. – Vol. 319. – P. 012022. DOI: 10.1088/1757-899X/319/1/012022Abdullah N., Ismail N.M., Nuruzzaman D.M. Preparation of tin oxide (SnO2) thin films using thermal oxidation. IOP Conf. Ser.: Mater. Sci. Eng., 2018, vol. 319, pp. 012022. DOI: 10.1088/1757-899X/319/1/012022Masterov, D.V. Thin films of YBaCuO hightemperature superconductor grown in a simplified magnetron sputterer and their microwave application / D.V. Masterov, S.A. Pavlov, A.E. Parafin, Yu.N. Drozdov // Technical Physics. The Russian Journal of Applied Physics. – 2007. – Vol. 52, no.10. – P. 1351–1355. DOI: 10.1134/S1063784207100167Masterov D.V., Pavlov S.A., Parafin A.E., Drozdov Yu.N. Thin films of YBaCuO high-temperature superconductor grown in a simplified magnetron sputterer and their microwave application. Technical Physics. The Russian Journal of Applied Physics, 2007, vol. 52, no. 10, pp. 1351–1355. DOI: 10.1134/S1063784207100167Рябцев, C.В. Механизмы окисления тонких металлических пленок олова / С.В. Рябцев [и др.] // Конденсированные среды и межфазные границы. – 2012. – Т. 14, № 3. – P. 328–333.Ryabtsev S.V., Chuvenkova O.A., Popov A.E., Chernyshov F.M., Ryabtseva N.S., Domashevskaya E.P. [Mechanisms of oxidation of thin metal films of tin]. Kondensirovannyye sredy i mezhfaznyye granitsy [Condensed matter and interphase boundaries], 2012, vol. 14, no. 3, pp. 328–333.Кондрашин, В.И. Определение толщины тонких оптически прозрачных пленок SnО2 конвертным методом / В.И. Кондрашин // Известия высших учебных заведений. Поволжский регион. Технические науки. – 2016. – № 2 (38). – С. 91–103.Kondrashin V.I. [Determination of the thickness of thin optically transparent films SnO2 by the envelope method.] Izvestiya vysshikh uchebnykh zavedeniy. Povolzhskiy region. Tekhnicheskiye nauki [Proceedings of higher educational institutions. Volga region. Technical science], 2016, vol. 2, no. 38, pp. 91–103.Brus, V.V. Optical properties of TiO2 -MnO2 thin films prepared by electron-beam evaporation / V.V. Brus, Z.D. Kovalyuk, P.D. Maryanchuk // Technical Physics. The Russian Journal of Applied Physics. – 2012. – Vol. 57, no. 8. – P. 1148–1151. DOI: 10.1134/S1063784212080063Brus V.V., Kovalyuk Z.D., Maryanchuk P.D. Optical properties of TiO2 -MnO2 thin films prepared by electron-beam evaporation. Technical Physics. The Russian Journal of Applied Physics, 2012, vol. 57, no. 8, pp. 1148–1151. DOI: 10.1134/S1063784212080063Брус, В.В. Особенности оптических и электрических свойств поликристаллических пленок CdTe, изготовленных методом термического испарения / В.В. Брус [и др.] // Физика твердого тела. – 2014. – Т. 56, № 10. – C. 1886–1890.Brus V.V., Solovan M.N., Maystruk E.V., Kozyarsky I.P., Marianchuk P.D., Rappich J. [Features of the optical and electrical properties of CdTe polycrystalline films manufactured by thermal evaporation]. Fizika tverdogo tela. [Solid state physics], 2014, vol. 56, no. 10, pp. 1886–1890.Baco, S. Study on optical properties of tin oxide thin film at different annealing temperature / S. Baco, A. Chik, F.M. Yassin // Journal of Science and Technology. – 2012. – Vol. 4, № 1. – P. 61–71.Baco S., Chik A., Yassin F.M. Study on optical properties of tin oxide thin film at different annealing temperature. Journal of Science and Technology, 2012, vol. 4, no. 1, pp. 61–71.Abraham, J.T. Oxidation mechanism involved in thin tin films / J.T. Abraham [et al.] // Indian Journal of Engineering and Materials Sciences. – 1996. – Vol. 3, no. 3. – P. 109–113.Abraham J.T., Thomas P.V., Gopchandran K.G., Joseph B., Vaidyan V.K. Oxidation Mechanism Involved in Thin Tin Films. Indian Journal of Engineering and Materials Sciences, 1996, vol. 3, no. 3, pp. 109–113.Park, S.H. Tin oxide films made by physical vapor deposition-thermal oxidation and spray pyrolysis / S.H. Park [et al.] // Chem. Mater. – 1998. – Vol. 10, no. 9. – P. 2389–2398. DOI: 10.1021/cm970672xPark S.H., Son Y.C., Willis W.S., Suib S.L., Creasy K.E. Tin oxide films made by physical vapor deposition-thermal oxidation and spray pyrolysis. Chem. Mater., 1998, vol. 10, no. 9, pp. 2389–2398. DOI: 10.1021/cm970672xSaravanakumar, M. Structural and ferromagnetic investigation of the size effects in pure and Co doped SnO2 nano particles / M. Saravanakumar [et al.] // International journal of chemical sciences. – 2015. – Vol. 13, no. 2. – P. 605–606.Saravanakumar M., Agilan S., Muthukumarasamy N., Rukkumani V. Structural and ferromagnetic investigation of the size effects in pure and co doped SnO2 nanoparticles. International journal of chemical sciences, 2015, vol. 13, no. 2, pp. 605–606.Boroojerdian, P. Structural and Optical Study of SnO Nanoparticles Synthesized Using Microwave– Assisted Hydrothermal Route / P. Boroojerdian // International Journal of Nanoscience and Nanotechnology. – 2013. – Vol. 9, no. 2 – P. 95–100.Boroojerdian P. Structural and optical study of SnO nanoparticles synthesized using microwave–assisted hydrothermal route. International Journal of Nanoscience and Nanotechnology, 2013, vol. 9, no. 2, pp. 95–100.Sangaletti, L. Oxidation of Sn thin films to SnO2 . Micro-raman mapping and X-ray diffraction studies / L. Sangaletti // Journal of Materials Research. – 1998. – Vol. 13, no. 9. – P. 2457–2460. DOI: 10.1557/JMR.1998.0343PSangaletti L., Depero L.E., Allieri B., Pioselli F., Comini E., Sberveglieri G., Zocchi M. Oxidation of Sn thin films to SnO2 . Micro-raman mapping and X-ray diffraction studies. Journal of Materials Research, 1998, vol. 13, no. 9, pp. 2457–2460. DOI: 10.1557/JMR.1998.0343PShahtahmassebi, N. Fabrication and characterization of Silver-Tin dioxide core-shell structured nanocomposite particles // Materials Physics and Mechanics. – 2013. – Vol. 17, no. 1. – P. 29–32.Shahtahmassebi N., Zohuri G.H., Attaran E., Nouri M.K. Fabrication and characterization of Silver-Tin dioxide core-shell structured nanocomposite particles. Materials Physics and Mechanics, 2013, vol. 17, no. 1, pp. 29–32.Ahn, H.-J. Investigation of the structural and electrochemical properties of size-controlled SnO2 nanoparticles / H.-J. Ahn [et al.] // J. Phys. Chem. B. – 2004. – Vol. 108, no. 28. – P. 9815–9820. DOI: 10.1021/jp035769nAhn H.-J., Choi H.-C., Park K.-W., Kim S.-B., Sung Y.-E. Investigation of the structural and electrochemical properties of size-controlled SnO2 nanoparticles. J. Phys. Chem. B, 2004, vol. 108, no. 28, pp. 9815–9820. DOI: 10.1021/jp035769n

The authors declare that there are no conflicts of interest present.