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Devices and Methods of Measurements

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For citations:

Sianko S.F., Zelenin V.A. Control of local stress in semiconductor silicon structures. Devices and Methods of Measurements. 2018;9(3):254-262. (In Russ.) https://doi.org/10.21122/2220-9506-2018-9-3-254-262



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This work is licensed under a Creative Commons Attribution 4.0 License.


ISSN 2220-9506 (Print)
ISSN 2414-0473 (Online)

Belarusian National Technical University
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