For citations:

Burmakou A.P., Kuleshov V.N., Stoliarov A.V. SYSTEM OF STABILIZATION OF REACTIVE MAGNETRON SPUTTERING PROCESS. Devices and Methods of Measurements. 2018;9(2):114-120. (In Russ.) https://doi.org/10.21122/2220-9506-2018-9-2-114-120