For citations:

Zharin A.L., Mikitsevich U.A., Svistun A.I., Pantsialeyeu K.U. Universal Digital Probe Electrometer for Testing Semiconductor Wafers. Devices and Methods of Measurements. 2023;14(3):161-172. (In Russ.) https://doi.org/10.21122/2220-9506-2023-14-3-161-172