KELVIN PROBE SELF-CALIBRATION MODE FOR SEMICONDUCTOR WAFERS PROPERTIES MONITORING
Abstract
About the Authors
R. I. VorobeyBelarus
O. K. Gusev
Belarus
A. L. Zharin
Belarus
A. N. Petlitsky
Belarus
V. A. Pilipenko
Belarus
A. S. Turtsevitch
Belarus
A. K. Tyavlovsky
Belarus
References
1. Zharin A.L. Contact Potential Difference Techniques as Probing Tools in Tribology and Surface Mapping. Applied Scanning Probe Methods, 2010, vol. 14, pp. 687–720.
2. Ibragimov H.I., Korol’kov V.A. Rabota vykhoda elektrona v fiziko-khimicheskikh issledovaniyakh [Electron work function in physical and chemical studies]. Moscow, Intermet Engineering Publ., 2002. 526 p.
3. Tyavlovsky A.K., Gusev O.K., Zharin A.L. [Metrological performance modeling of probe electrometers capacitive sensors]. Pribory i metody izmerenij, 2011, no. 1(2), pp. 122–127 (in Russian).
4. Kim J.S., Lagel B., Moons E., Johansson N., Baikie I.D., Salaneck W.R., Friend R.H., Cacialli F. Kelvin probe and ultraviolet photoemission measurements of indium tin oxide work function: a comparison. Synthetic Metals, 2000, vol. 111–112, pp. 311–314.
5. Kronik L., Shapira Y. Surface photovoltage phenomena: theory, experiment, and applications. Surface Science Reports, 1999, vol. 37, pp. 1–206.
6. Chiang C.L., Schwarz R., Slobodin D.E., Kolodzey J., Wagner S. Measurement of the minority-carrier diffusion length in thin semiconductor films. IEEE Trans. Electron Devices, 1986, vol. 33, pp. 1587–1592.
7. Vorobey R.I., Zharin A.L., Gusev O.K., Petlitsky A.N., Pilipenko V.A., Turtsevitch A.S., Tyavlovsky A.K., Tyavlovsky K.L. [Study of silicon-insulator structure defects based on analysis of a spatial distribution of a semiconductor wafer’s surface potential]. Pribory i metody izmerenij, 2013, no. 2(7), pp. 67–72 (in Russian).
Review
For citations:
Vorobey R.I., Gusev O.K., Zharin A.L., Petlitsky A.N., Pilipenko V.A., Turtsevitch A.S., Tyavlovsky A.K. KELVIN PROBE SELF-CALIBRATION MODE FOR SEMICONDUCTOR WAFERS PROPERTIES MONITORING. Devices and Methods of Measurements. 2014;(2):46-52. (In Russ.)