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Devices and Methods of Measurements

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For citations:

Solodukha V.A., Pilipenko U.A., Omelchenko A.A., Shestovski D.V. Spectral Ellipsometry as a Method of Investigation of Influence of Rapid Thermal Processing of Silicon Wafers on their Optical Characteristics. Devices and Methods of Measurements. 2022;13(3):199-207. https://doi.org/10.21122/2220-9506-2022-13-3-199-207

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ISSN 2220-9506 (Print)
ISSN 2414-0473 (Online)

Belarusian National Technical University
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Phone: +375 17 293 96 67
E-mail: pimi@bntu.by

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