For citations:

Brinkevich D.I., Prosolovich V.S., Yankovski Yu.N., Vabishchevich S.A., Vabishchevich N.V., Gaishun V.E. MEASUREMENT OF MICROHARDNESS OF PHOTORESIST FILMS ON SILICON BY THE SCRATCHING METHOD. Devices and Methods of Measurements. 2016;7(1):77-84. (In Russ.) https://doi.org/10.21122/2220-9506-2016-7-1-7-13