METROLOGICAL PERFORMANCE MODELING OF PROBE ELECTROMETERS CAPACITIVE SENSORS
https://doi.org/10.21122/2220-9506-2011-0-1-104-110
Abstract
A transducer function of probe electrometer’s primary capacitive sensor was calculated using a harmonic complex analysis technique. The obtained expression allows analyzing metrological characteristics of the circuit containing the dynamic capacitor at any values of its parameters. Study of circuit's peak-frequency and phase-frequency characteristics was held giving recommendations on using of different parts of frequency characteristic when designing measuring systems on a basis of dynamic capacitor.
About the Authors
A. K. Tyavlovsky
Belarusian National Technical University
Belarus
Belarus
O. K. Gusev
Belarusian National Technical University
Belarus
Belarus
A. L. Zharin
Belarusian National Technical University
Belarus
Belarus
References
1. Lonardo, P. M. Emerging Trends in Surface Metrology / P. M. Lonardo, D. A. [et al.] // CIRP Annals Manufacturing Technology. – 2002. – № 51(2). – P. 701–723.
2. Booth, J. E. Scuffing detection of TU3 camfollower contacts by electrostatic charge condition monitoring / J. E. Booth [et al.] // Tribology International. – 2010. – № 43. – P. 113–128.
3. Пухов, Г. Е. Комплексное исчисление и его применение / Г. Е. Пухов.– К. : Из-во АН УССР, 1961. – 220 с.
4. Zharin, A. L. Contact Potential Dierence Techniques as Probing Tools in Tribology and Surface Mapping / A. L. Zharin // Scanning Probe Microscopy in Nanoscience and Nanotechnology (edited by B. Bhushan). – Springer Heidelberg Dordrecht London New York, 2010. – P. 687–720.
5. Taylor, D. M. Measuring techniques for electrostatics / D. M. Taylor // Journal of Electrostatics. – 2001. – № 51–52. – P. 502–508.
Review
For citations:
Tyavlovsky A.K., Gusev O.K., Zharin A.L. METROLOGICAL PERFORMANCE MODELING OF PROBE ELECTROMETERS CAPACITIVE SENSORS. Devices and Methods of Measurements. 2011;(1):122-127. (In Russ.) https://doi.org/10.21122/2220-9506-2011-0-1-104-110
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