MATHEMATICAL MODELING OF A DISTANCE DEPENDENCE OF A SCANNING KELVIN PROBE LATERAL RESOLUTION
Abstract
A mathematical model of cylindrical shaped plane-ended scanning Kelvin probe output signal is proposed considering the case of an infinite plane sample's surface with local defects represented by dot charges. Modeling results were obtained for the case of two closely situated dot charges anddifferent combinations of scanning Kelvin probe tip's diameter and sample-to-probe gap. It was found that the most effective way to improve the lateral resolution of a scanning Kelvin probe is to reduce the sample-to-probe gap in line with the reduction of sensor's vibration amplitude.
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Review
For citations:
Tyavlovsky A.K. MATHEMATICAL MODELING OF A DISTANCE DEPENDENCE OF A SCANNING KELVIN PROBE LATERAL RESOLUTION. Devices and Methods of Measurements. 2012;(1):30-36. (In Russ.)
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