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<article article-type="research-article" dtd-version="1.3" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xml:lang="ru"><front><journal-meta><journal-id journal-id-type="publisher-id">pimi</journal-id><journal-title-group><journal-title xml:lang="ru">Приборы и методы измерений</journal-title><trans-title-group xml:lang="en"><trans-title>Devices and Methods of Measurements</trans-title></trans-title-group></journal-title-group><issn pub-type="ppub">2220-9506</issn><issn pub-type="epub">2414-0473</issn><publisher><publisher-name>BNTU</publisher-name></publisher></journal-meta><article-meta><article-id pub-id-type="doi">10.21122/2220-9506-2016-7-2-136-144</article-id><article-id custom-type="elpub" pub-id-type="custom">pimi-250</article-id><article-categories><subj-group subj-group-type="heading"><subject>Research Article</subject></subj-group><subj-group subj-group-type="section-heading" xml:lang="ru"><subject>Средства измерений</subject></subj-group><subj-group subj-group-type="section-heading" xml:lang="en"><subject>Measuring instruments</subject></subj-group></article-categories><title-group><article-title>ЦИФРОВОЙ ИЗМЕРИТЕЛЬ КОНТАКТНОЙ РАЗНОСТИ ПОТЕНЦИАЛОВ</article-title><trans-title-group xml:lang="en"><trans-title>DIGITAL CONTACT POTENTIAL DIFFERENCE PROBE</trans-title></trans-title-group></title-group><contrib-group><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Пантелеев</surname><given-names>К. В.</given-names></name><name name-style="western" xml:lang="en"><surname>Pantsialeyeu</surname><given-names>K. U.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Адрес для переписки: Пантелеев К.В. – Белорусский национальный технический университет, пр. Независимости, 65, 220013, г. Минск, Беларусь e-mail: k.pantsialeyeu@bntu.by</p></bio><bio xml:lang="en"><p>Address for correspondence: Pantsialeyeu K.U. – Belarusian National Technical University, Nezavisimosty Ave., 65, 220013, Minsk, Belarus e-mail: k.pantsialeyeu@bntu.by</p></bio><email xlink:type="simple">k.pantsialeyeu@bntu.by</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Свистун</surname><given-names>А. И.</given-names></name><name name-style="western" xml:lang="en"><surname>Svistun</surname><given-names>A. I.</given-names></name></name-alternatives><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Тявловский</surname><given-names>А. К.</given-names></name><name name-style="western" xml:lang="en"><surname>Tyavlovsky</surname><given-names>A. K.</given-names></name></name-alternatives><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Жарин</surname><given-names>А. Л.</given-names></name><name name-style="western" xml:lang="en"><surname>Zharin</surname><given-names>A. L.</given-names></name></name-alternatives><xref ref-type="aff" rid="aff-1"/></contrib></contrib-group><aff-alternatives id="aff-1"><aff xml:lang="ru"><institution>Белорусский национальный технический университет</institution><country>Беларусь</country></aff><aff xml:lang="en"><institution>Belarusian National Technical University</institution><country>Belarus</country></aff></aff-alternatives><pub-date pub-type="collection"><year>2016</year></pub-date><pub-date pub-type="epub"><day>12</day><month>09</month><year>2016</year></pub-date><volume>7</volume><issue>2</issue><fpage>136</fpage><lpage>144</lpage><permissions><copyright-statement>Copyright &amp;#x00A9; Пантелеев К.В., Свистун А.И., Тявловский А.К., Жарин А.Л., 2016</copyright-statement><copyright-year>2016</copyright-year><copyright-holder xml:lang="ru">Пантелеев К.В., Свистун А.И., Тявловский А.К., Жарин А.Л.</copyright-holder><copyright-holder xml:lang="en">Pantsialeyeu K.U., Svistun A.I., Tyavlovsky A.K., Zharin A.L.</copyright-holder><license xml:lang="ru" license-type="creative-commons-attribution" xlink:href="https://creativecommons.org/licenses/by/4.0/" xlink:type="simple"><license-p>Данная работа распространяется под лицензией Creative Commons Attribution 4.0.</license-p></license><license xml:lang="en" license-type="creative-commons-attribution" xlink:href="https://creativecommons.org/licenses/by/4.0/" xlink:type="simple"><license-p>This work is licensed under a Creative Commons Attribution 4.0 License.</license-p></license></permissions><self-uri xlink:href="https://pimi.bntu.by/jour/article/view/250">https://pimi.bntu.by/jour/article/view/250</self-uri><abstract><p>В настоящее время принципы построения аналоговых измерителей контактной разности потенциалов достаточно хорошо отработаны. Однако остаются и некоторые недостатки. Из-за влияния ряда паразитных факторов, аналоговые измерители имеют область неопределенности и значительную погрешность. Для достижения высокой точности требуется интеграция сигнала с постоянной времени не менее нескольких секунд. Скорость и точность измерения имеет существенное значение, например, для сканирующих зондов Кельвина (SKP). Целью настоящей работы является разработка цифрового измерителя контактной разности потенциалов, обладающего повышенной точностью и быстродействием, по сравнению с традиционными. Цифровой измеритель выполнен на базе 32-разрядного микропроцессора с ядром Cortex M4. Измерительный цикл состоит из двух последовательных определений амплитуды выходного сигнала при двух разных значениях напряжения компенсации, вырабатываемых микроконтроллером. Микроконтроллер также генерирует колебания вибратора, что позволяет осуществить общую синхронизацию генерации колебаний и считывания измерительного сигнала. Массив данных может быть обработан в режиме реального времени средствами цифровой обработки сигнала (DSP) микроконтроллера. При этом возможно вычисление среднеквадратичного значения или определение величины необходимой спектральной линии сигнала после быстрого преобразования Фурье. Оба метода позволяют отстроится от случайных помех и паразитных гармоник. Цифровой метод обеспечивает работу измерителя контактной разности потенциалов в режиме больших сигналов при большом соотношении сигнал/шум, что исключает область неопределенности, имеющуюся в аналоговом измерителе, и погрешность, связанную с поиском нулевого сигнала. Отсутствует необходимость интеграции для автокомпенсации измеряемой величины, что в несколько десятков раз (зависит от частоты колебаний динамического конденсатора) уменьшает время измерений и исключает погрешности следящей системы и цифро-аналогового преобразования. Кроме выполнения необходимых манипуляций по определению контактной разности потенциалов, микроконтроллер может также управлять перемещением зонда при сканировании, осуществлять передачу данных на хост-компьютер по USB интерфейсу и т.п. </p></abstract><trans-abstract xml:lang="en"><p>Nowadays the technique of analog contact potential difference probes well developed. Due to the influence of various parasitic factors, analog probes has substantial errors. The integration time for automatic CPD compensation should be at least several seconds to achieve high accuracy measurements. The speed and the accuracy are essential, for example, for Scanning Kelvin Probes. The purpose of this paper is to develop a digital contact potential difference probe, with a higher accuracy and speed of measurements as compared to analog probe. The digital probe made on base of 32-bit microprocessor with a Cortex M4 core. Measuring cycle consists of at least two successive determinations of the output signal amplitude at different compensation voltage generated by the microcontroller. It allows synchronizing of the generated oscillations and reading of the measuring signals. Data arrays processed in real time of the Digital Signal Processing by microprocessor. In this case is possible computation of the root mean square value or determination of the desired spectral line of the signal after fast Fourier transformation. Both methods permit eliminate of random noise and spurious harmonics. The method provides the digital contact potential difference probe operation in large signal mode and with a large signal/noise ratio. This eliminates the error associated with the zero signal finding. Also the integration time for automatic CPD compensation of the measured value is not necessary, which significantly reduces the measurement time and eliminates errors of compensation and DAC. In addition, the microcontroller could control the movement of the probe during scanning and transfer data to the host computer on interface USB, etc.</p></trans-abstract><kwd-group xml:lang="ru"><kwd>зонд Кельвина</kwd><kwd>контактная разность потенциалов</kwd><kwd>цифровой измеритель КРП</kwd><kwd>работа выхода электрона</kwd><kwd>электростатический потенциал</kwd></kwd-group><kwd-group xml:lang="en"><kwd>Kelvin probe</kwd><kwd>contact potential difference</kwd><kwd>digital CPD probe</kwd><kwd>electron work function</kwd><kwd>electrostatic potential</kwd></kwd-group></article-meta></front><back><ref-list><title>References</title><ref id="cit1"><label>1</label><citation-alternatives><mixed-citation xml:lang="ru">Пантелеев, К.В. Построение измерителей контактной разности потенциалов / К.В. Пантелеев, В.А. Микитевич, А.Л. 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