pimiПриборы и методы измеренийDevices and Methods of Measurements2220-95062414-0473BNTUpimi-220Research ArticleСредства измеренийMeasuring instrumentsУПРАВЛЕНИЕ ЧУВСТВИТЕЛЬНОСТЬЮ ИНЕРЦИОННОГО ДАТЧИКА С ДИФФЕРЕНЦИАЛЬНЫМ ЭЛЕКТРОСТАТИЧЕСКИМ ПРЕОБРАЗОВАТЕЛЕМCONTROLLING SENSITIVITY OF THE SENSOR WITH DIFFERENTIAL ELECTROSTATIC TRANSDUCERSДжилавдариИ. З.GilavdaryI. Z.

Адрес для переписки: Джилавдари И.З. Белорусский национальный технический университет, пр. Независимости, 65, 220013, г. Минск, Беларусь e-mail: gilavdary@bntu.by

Address for correspondence: Gilavdary I. Belarusian National Technical University, Nezavisimosty Ave., 65, 220013 Minsk, Belarus e-mail: gilavdary@bntu.by

gilavdary@bntu.byМекидС. Н.MekidS. N.gilavdary@bntu.byРизноокаяН. Н.RiznookayaN. N.gilavdary@bntu.byБелорусский национальный технический университетБеларусьBelarusian National Technical UniversityBelarusУниверситет нефти и минералов короля Фадха, ДхахранСаудовская АравияKing Fahd University of Petroleum & Minerals, Mechanical Engineering Department, DhahranSaudi Arabia20150912201562163172Copyright © Джилавдари И.З., Мекид С.Н., Ризноокая Н.Н., 20152015Джилавдари И.З., Мекид С.Н., Ризноокая Н.Н.Gilavdary I.Z., Mekid S.N., Riznookaya N.N.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://pimi.bntu.by/jour/article/view/220

Формулируется проблема разработки датчика для измерения моментов сил инерции и гравитации с минимальным уровнем шумов и минимально возможной крутильной жесткостью торсионного подвеса подвижной массы, обеспечивающих достижение максимальной чувствительности прибора. Обосновывается возможность решения этой проблемы с помощью дифференциальной емкостной системы, которая одновременно обеспечивает и считывание полезного сигнала, и уменьшение крутильной жесткости. Отмечается, что основным фактором, определяющим минимальную крутильную жесткость, является известный pull-in эффект, возникающий в электростатическом конденсаторе с подвижной пластиной. Описывается электромеханическая схема датчика с дифференциальной электростатической системой. Предлагается методика расчета емкости электростатического конденсатора с наклонной пластиной. Проводится расчет момента электрических и механических сил, действующих на подвижную пластину дифференциального конденсатора. Показано, что основной причиной, приводящей к pull-in эффекту в дифференциальном конденсаторе, является несимметричность электростатической системы. Вводится параметр несимметричности этой системы. Установлена зависимость резонансной частоты датчика от электрического напряжения и параметра несимметричности. Рассчитываются области квазистатической стабильности и нестабильности системы, границы которых определяются значением данного коэффициента. Проводится расчет конкретной модели датчика. Показано, что для уменьшения резонансной частоты датчика более чем в 10 раз требуются нереально малые значения параметра несимметричности. 

The problem of developing a sensor for measuring of moment forces of inertia and gravitation with minimal noise and minimal rigidity of the torsion suspension of proof mass (PM) is formulated. The possibility to solve this problem by a differential capacitive system, which simultaneously provides forming of the useful signal and reducing the torsion rigidity is shown. Sensor’s electromechanical circuit with differential electrostatic system is described. Method of calculating the electrostatic capacitance of the capacitor with an inclined plate is proposed. Calculations of electrical and mechanical forces moment acting on the movable plate of the differential capacitor in quasi-static mode are performed. It is shown that the main factor leading to the pull-in effect in the differential capacitor is the asymmetry of electrostatic system. The coefficient of asymmetry of the differential electrostatic system is introduced. The dependence on voltage of the resonance frequency of the sensor is received. The areas of the quasi-static stability of the system are calculated. It is shown that their boundaries are determined by the value of the coefficient of asymmetry, as well as by the value of the resonant frequency of the PM. It is shown that for reducing the resonant frequency of the sensor in more then ten times an unrealistically low values of the coefficient of asymmetry are required. 

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The authors declare that there are no conflicts of interest present.